A wafer mapping technique for residual stress in surface micromachined films

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Date Available
2016-08-01
Type
dataset
Data Creator
Schiavone, Giuseppe
Murray, Jeremy
Publisher
University of Edinburgh. School of Engineering
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Citation
Schiavone, Giuseppe; Murray, Jeremy. (2016). A wafer mapping technique for residual stress in surface micromachined films, [dataset]. University of Edinburgh. School of Engineering. https://doi.org/10.7488/ds/1424.
Description
Data supporting a forthcoming publication.
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