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Depositordc.contributorSchmueser, Ilka
Funderdc.contributor.otherEPSRC - Engineering and Physical Sciences Research Councilen_UK
Data Creatordc.creatorSchmueser, Ilka
Data Creatordc.creatorMackay, Logan
Data Creatordc.creatorMoore, Fiona
Data Creatordc.creatorDoherty, Kayleigh
Data Creatordc.creatorElliott, Justin P.
Data Creatordc.creatorMount, Andrew R.
Data Creatordc.creatorWalton, Anthony J.
Data Creatordc.creatorSmith, Stewart
Data Creatordc.creatorTerry, Jonathan G.
Date Accessioneddc.date.accessioned2020-01-31T09:32:02Z
Date Availabledc.date.available2020-01-31T09:32:02Z
Citationdc.identifier.citationSchmueser, Ilka; Mackay, Logan; Moore, Fiona; Doherty, Kayleigh; Elliott, Justin P.; Mount, Andrew R.; Walton, Anthony J.; Smith, Stewart; Terry, Jonathan G.. (2020). Data set for "Automated Wafer-Level Characterisation of Electrochemical Test Structures for Wafer Scanning", [dataset]. University of Edinburgh. School of Engineering. https://doi.org/10.7488/ds/2759.en
Persistent Identifierdc.identifier.urihttps://hdl.handle.net/10283/3561
Persistent Identifierdc.identifier.urihttps://doi.org/10.7488/ds/2759
Dataset Description (abstract)dc.description.abstractThis paper presents an automated system for the electrochemical characterization of micro-scale test structures at the wafer level, with the objective to identify good devices suitable for full characterization and packaging. The integration of the on-wafer characterization enables a quality assessment of the devices prior to packaging ensuring the development of this technology minimizes the packaging of faulty sensors. The prototype system integrates all the elements for automated on-wafer in-line characterization of electrochemistry based systems thereby confirming the suitability of this approach for implementation on commercial automated probers, which are generally available for parametric testing. The system's capabilities are demonstrated on a three-electrode cell design typically employed in electrochemical sensing applications. Finally, the system is integrated with a semi-automatic probe station and its potential demonstrated by wafer mapping the performance of electrochemical microelectrode devices.en_UK
Languagedc.language.isoengen_UK
Publisherdc.publisherUniversity of Edinburgh. School of Engineeringen_UK
Rightsdc.rightsCreative Commons Attribution 4.0 International Public Licenseen
Subject Classificationdc.subject.classificationEngineeringen_UK
Titledc.titleData set for "Automated Wafer-Level Characterisation of Electrochemical Test Structures for Wafer Scanning"en_UK
Typedc.typedataseten_UK

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